Title :
Diamond Microfluidic Devices manufactured with the replica method
Author :
Karczemska, Anna ; Witkowski, Dariusz ; Ralchenko, Victor ; Bolshakov, Andrey ; Sovyk, Dmitry ; Lysko, Jan ; Hassard, John
Author_Institution :
Inst. of Turbomachinery, Tech. Univ. of Lodz, Lodz
Abstract :
Diamond Microfluidic Devices have been manufactured with the transfer moulding (so-called replica) method. Standard photolitography, SiO2/Al masking layers and high aspect ratio plasma etching (Bosch process) were used to form vertical walls of deep shapes in silicon. Then, a thick polycrystalline diamond layer was deposited (MPCVD) on the surface of the pre-shaped silicon mould, silicon was etched-off and a diamond microfluidic device with deep microchannels was obtained.
Keywords :
DNA; bioMEMS; diamond; genomics; masks; microfabrication; microfluidics; photolithography; plasma CVD; proteomics; replica techniques; sputter etching; transfer moulding; Bosch process; C; MPCVD; deep microchannels; diamond microfluidic devices; high aspect ratio plasma etching; photolitography; polycrystalline diamond layer; preshaped silicon mould; replica method; silica-aluminium masking layers; transfer moulding method; Etching; Manufacturing; Microchannel; Microfluidics; Plasma applications; Plasma devices; Plasma materials processing; Shape; Silicon; Transfer molding; Polycrystalline diamond; microfluidics; microwave plasma CVD;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2009. MEMSTECH 2009. 2009 5th International Conference on
Conference_Location :
Zakarpattya
Print_ISBN :
978-966-2191-06-6
