Overview and analysis of readout circuits for capacitive sensing in MEMS gyroscopes (MEMS angular velocity sensors)

Author

Lobur, Mykhaylo ; Holovatyy, Andriy

Author_Institution

Dept. of CAD, Lviv Polytech. Nat. Univ., Lviv

fYear

2009

fDate

22-24 April 2009

Firstpage

161

Lastpage

163

Abstract

In the article, overview and analysis of the performance of capacitive sensing circuits for MEMS gyroscopes are presented. Their performance, advantages and disadvantages are given. The low-noise chopper stabilized readout circuit for capacitive measurements in MEMS gyroscopes is proposed.

Keywords

angular velocity measurement; capacitance measurement; capacitive sensors; circuit stability; gyroscopes; microsensors; readout electronics; MEMS angular velocity sensor; MEMS gyroscope; capacitive measurement; capacitive sensing circuit; low-noise chopper stabilized readout circuit; Angular velocity; Capacitive sensors; Capacitors; Circuit analysis; Circuit noise; Gyroscopes; Micromechanical devices; Noise level; Noise reduction; Voltage; MEMS (MicroElectroMechanical Systems); MEMS gyroscope; capacitive sensing circuit; chopper stabilized capacitive readout amplifier; continous-time voltage sensing; continuous-time current-mode capacitive sensing; continuous-time voltage-mode capacitive sensing; switched-capacitor charge integrator for capacitive sensing;

fLanguage

English

Publisher

ieee

Conference_Titel

Perspective Technologies and Methods in MEMS Design, 2009. MEMSTECH 2009. 2009 5th International Conference on

Conference_Location

Zakarpattya

Print_ISBN

978-966-2191-06-6

Type

conf

Filename

5069739