Title :
Effect of annealing varied temperature on electrical and optical properties of indium tin oxide films at oxygen atmosphere
Author :
Srithanachai, I. ; Niemcharoen, S. ; Ueamanapong, S. ; Nutaman, K. ; Atiwongsangthong, N.
Author_Institution :
Dept. of Electron. Fac. of Eng., King Mongkut´´s Inst. of Technol. Ladkrabang, Bangkok, Thailand
Abstract :
Indium tin oxide (ITO) films were deposited on non-heated glass slide which prepared by RF sputtering system at room temperature. The temperatures of annealing were varied at 200, 300, 400 and 500 Celsius, respectively. Effect of oxygen flow on properties of ITO films has been studied. The optical properties were characterized by UV-Vis spectrophotometer. Electrical properties were characterized by 4-point probe. The results show that transmittance and sheet resistance could be improved by heat treatment. We could get the minimum sheet resistance of 120 Omega/square and over 85% of the average transmittance in visible light.
Keywords :
annealing; electrical resistivity; indium compounds; semiconductor materials; semiconductor thin films; sputter deposition; ultraviolet spectra; visible spectra; 4-point probe; ITO; RF sputtering system; UV-Vis spectrophotometer; annealing; electrical properties; heat treatment; nonheated glass slide; optical properties; oxygen atmosphere; room temperature; sheet resistance; temperature 293 K to 298 K; temperature 473 K; temperature 573 K; temperature 673 K; temperature 773 K; thin films; transmittance; Annealing; Atmosphere; Electric resistance; Glass; Indium tin oxide; Optical films; Probes; Radio frequency; Sputtering; Temperature;
Conference_Titel :
Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology, 2009. ECTI-CON 2009. 6th International Conference on
Conference_Location :
Pattaya, Chonburi
Print_ISBN :
978-1-4244-3387-2
Electronic_ISBN :
978-1-4244-3388-9
DOI :
10.1109/ECTICON.2009.5137054
