DocumentCode :
494791
Title :
Magnetic field reduction using metal screening for electron microscope: A case study
Author :
Ranade, Sulabha R. ; Joshi, Milind Y.
Author_Institution :
Soc. for Appl. Microwave Electron. Eng.&Res., Mumbai, India
fYear :
2008
fDate :
26-27 Nov. 2008
Firstpage :
173
Lastpage :
175
Abstract :
The paper presents the countermeasures to reduce the influence of an external magnetic field in the beam area of an electron microscope that is required to be minimal for achieving accurate image quality of a scanned sample. The requirement of the AC magnetic field due to power line frequency of 50 Hz needs to be below the value of 50 nT peak-peak (17.67 nT RMS) in any direction (X, Y, Z axis), at the installation site of the electron microscope (Tecnai Titan 300 kV system) procured and installed at TIFR, Mumbai. After site inspection and employing the appropriate measure of shielding, the value of the magnetic field was brought down to the acceptable limit of Lt 50 nT.
Keywords :
electron microscopes; inspection; magnetic field effects; magnetic shielding; AC magnetic field; electron microscope; external magnetic field; frequency 50 Hz; image quality; magnetic field reduction; magnetic flux density 50 nT; metal screening; power line frequency; site inspection; voltage 300 kV; Electron beams; Electron microscopy; Frequency; Image quality; Inspection; Magnetic field measurement; Magnetic fields; Magnetic force microscopy; Magnetic shielding; Scanning electron microscopy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electromagnetic Interference & Compatibility, 2008. INCEMIC 2008. 10th International Conference on
Conference_Location :
Bangalore
Print_ISBN :
978-81-903575-1-7
Type :
conf
Filename :
5154237
Link To Document :
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