• DocumentCode
    497180
  • Title

    New experimental insight into ballisticity of transport in strained bulk MOSFETs

  • Author

    Fleury, D. ; Bidal, G. ; Cros, A. ; Boeuf, F. ; Skotnicki, T. ; Ghibaudo, G.

  • Author_Institution
    STMicroelectronics, Crolles, France
  • fYear
    2009
  • fDate
    16-18 June 2009
  • Firstpage
    16
  • Lastpage
    17
  • Abstract
    This paper proposes a new expression unifying all transport mechanisms (drift-diffusion, velocity-saturation and quasi-ballistic). This enables an experimental extraction of the limiting velocity and also, for the first time, a determination of its nature (thermal injection or velocity saturation). We show that the observed increase in the limiting velocity in short and strained devices was confusingly interpreted as an evidence of increasing ballisticity. At least down to 20 nm channel length, the transport remains velocity-saturation limited. However, the good news we confirm experimentally is that Vsat increases itself in short and strained devices. This promises an increase in Ion, even if the nature of the transport is velocity-saturated. This new findings open doors for the study and optimization of transport in advanced CMOS technologies.
  • Keywords
    CMOS integrated circuits; MOSFET; CMOS; drift-diffusion; quasi-ballistic; size 20 nm; strained bulk MOSFET; thermal injection; transport ballisticity; transport mechanisms; velocity-saturation; Backscatter; CMOS technology; Doping; MOSFETs; Performance evaluation; Scattering; Temperature dependence; Temperature distribution; Temperature measurement; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 2009 Symposium on
  • Conference_Location
    Honolulu, HI
  • Print_ISBN
    978-1-4244-3308-7
  • Type

    conf

  • Filename
    5200617