DocumentCode
497180
Title
New experimental insight into ballisticity of transport in strained bulk MOSFETs
Author
Fleury, D. ; Bidal, G. ; Cros, A. ; Boeuf, F. ; Skotnicki, T. ; Ghibaudo, G.
Author_Institution
STMicroelectronics, Crolles, France
fYear
2009
fDate
16-18 June 2009
Firstpage
16
Lastpage
17
Abstract
This paper proposes a new expression unifying all transport mechanisms (drift-diffusion, velocity-saturation and quasi-ballistic). This enables an experimental extraction of the limiting velocity and also, for the first time, a determination of its nature (thermal injection or velocity saturation). We show that the observed increase in the limiting velocity in short and strained devices was confusingly interpreted as an evidence of increasing ballisticity. At least down to 20 nm channel length, the transport remains velocity-saturation limited. However, the good news we confirm experimentally is that Vsat increases itself in short and strained devices. This promises an increase in Ion, even if the nature of the transport is velocity-saturated. This new findings open doors for the study and optimization of transport in advanced CMOS technologies.
Keywords
CMOS integrated circuits; MOSFET; CMOS; drift-diffusion; quasi-ballistic; size 20 nm; strained bulk MOSFET; thermal injection; transport ballisticity; transport mechanisms; velocity-saturation; Backscatter; CMOS technology; Doping; MOSFETs; Performance evaluation; Scattering; Temperature dependence; Temperature distribution; Temperature measurement; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 2009 Symposium on
Conference_Location
Honolulu, HI
Print_ISBN
978-1-4244-3308-7
Type
conf
Filename
5200617
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