Reduction of RTA-driven intra-die variation via model-based layout optimization

Author

Scott, J.C. ; Gluschenkov, O. ; Goplen, B. ; Landis, H. ; Nowak, E. ; Clougherty, F. ; Mocuta, A. ; Hook, T. ; Zamdmer, N. ; Lai, C.W. ; Eller, M. ; Chidambarrao, D. ; Yu, J. ; Chang, P. ; Ferris, J. ; Deshpande, S. ; Li, Y. ; Shang, H. ; Hefferon, G. ; D

Author_Institution

IBM Almaden Res. Center, San Jose, CA, USA

fYear

2009

fDate

16-18 June 2009

Firstpage

152

Lastpage

153

Abstract

Unique hybrid approach employing both model-based layout optimization and process improvement was successfully developed for reducing rapid thermal anneal (RTA) driven intra die variations. It has been applied to multiple bulk and SOI designs. The model developed herein enables fast estimation of broad-band reflectance of a random layout in 65 nm, 45 nm, and 32 nm nodes and guides reflectance leveling in the post-design phase. This approach significantly reduces RTA-driven variations showing 30% reduction in intra die ring oscillator range in high-performance products.

Keywords

CMOS integrated circuits; application specific integrated circuits; circuit optimisation; integrated circuit layout; rapid thermal annealing; reflectivity; silicon-on-insulator; ASIC; CMOS; RTA-driven intra-die variation; SOI design; broadband reflectance; intra die ring oscillator; model-based layout optimization; process improvement; rapid thermal anneal; reflectance leveling; size 32 nm; size 45 nm; size 65 nm; Paper technology; Very large scale integration; ASIC; CMOS; DFM; RTA; Reflectance; Reflectivity; Variation;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 2009 Symposium on

Conference_Location

Honolulu, HI

Print_ISBN

978-1-4244-3308-7

Type

conf

Filename

5200669