Title :
Microfabricated out-of-plane scanning microlens for Raman Spectroscopy
Author :
Siu, Chin-Pang-Billy ; Zeng, Haishan ; Chiao, Mu
Author_Institution :
Dept. of Mech. Eng., Univ. of British Columbia, Vancouver, BC, Canada
Abstract :
We present a microfabricated out-of-plane scanning microlens for miniaturized Raman Spectroscopy. The out-of-plane actuation is electrostatic driven and achieves 90 mum scan range at 1 k Hz. A Raman spectrum analysis on drug, Tylenol, is reported.
Keywords :
Raman spectroscopy; microlenses; optical fabrication; Raman spectroscopy; Raman spectrum analysis; electrostatic driven; frequency 1 kHz; out-of-plane actuation; out-of-plane scanning microlens; wavelength 90 mum; Biomedical optical imaging; Electrodes; Electrostatics; Lenses; Microoptics; Optical refraction; Optical variables control; Raman scattering; Silicon; Spectroscopy; (120.3890) Medical optics instrumentation; (120.5800) Scanners; (220.3630) Lenses; (230.3990) Micro-optical devices; (230.4000) Microstructure fabrication;
Conference_Titel :
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-869-8
Electronic_ISBN :
978-1-55752-869-8
