DocumentCode
499280
Title
Microfabricated out-of-plane scanning microlens for Raman Spectroscopy
Author
Siu, Chin-Pang-Billy ; Zeng, Haishan ; Chiao, Mu
Author_Institution
Dept. of Mech. Eng., Univ. of British Columbia, Vancouver, BC, Canada
fYear
2009
fDate
2-4 June 2009
Firstpage
1
Lastpage
2
Abstract
We present a microfabricated out-of-plane scanning microlens for miniaturized Raman Spectroscopy. The out-of-plane actuation is electrostatic driven and achieves 90 mum scan range at 1 k Hz. A Raman spectrum analysis on drug, Tylenol, is reported.
Keywords
Raman spectroscopy; microlenses; optical fabrication; Raman spectroscopy; Raman spectrum analysis; electrostatic driven; frequency 1 kHz; out-of-plane actuation; out-of-plane scanning microlens; wavelength 90 mum; Biomedical optical imaging; Electrodes; Electrostatics; Lenses; Microoptics; Optical refraction; Optical variables control; Raman scattering; Silicon; Spectroscopy; (120.3890) Medical optics instrumentation; (120.5800) Scanners; (220.3630) Lenses; (230.3990) Micro-optical devices; (230.4000) Microstructure fabrication;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-55752-869-8
Electronic_ISBN
978-1-55752-869-8
Type
conf
Filename
5224359
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