Title :
Proposal of fabricating a woodpile photonic crystal nanocavity by a two-directional etching without wafer bonding
Author :
Tang, Lingling ; Yoshie, Tomoyuki
Author_Institution :
Dept. of Electr. & Comput. Eng., Duke Univ., Durham, NC, USA
Abstract :
Ultra-high-Q modes are designed in woodpile photonic crystal by modulating the unit cell size along a waveguide in complete photonic band gap. We propose to fabricate the nanocavities with a two-directional etching without wafer bonding.
Keywords :
nanostructured materials; photonic crystals; wafer bonding; 2D etching; two-directional etching; ultra-high-Q modes; unit cell size; wafer bonding; woodpile photonic crystal nanocavity; Etching; Fabrication; Optical resonators; Optical waveguides; Photonic band gap; Photonic crystals; Proposals; Q factor; Wafer bonding; Waveguide discontinuities; 230.5298 Photonic crystals; 230.5750 Resonators;
Conference_Titel :
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-869-8
Electronic_ISBN :
978-1-55752-869-8
