Title :
Advances in on-chip polymer optics for optofluidics
Author :
Godin, Jessica ; Lo, Yu-Hwa
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of California at San Diego, La Jolla, CA, USA
Abstract :
We present liquid-turned-solid lenses (Deltan~1.2) in polymer devices replicated from cryogenically-etched silicon molds, with estimated per surface losses of .2-.4 dB. The process creates optical-quality sidewalls (sigmaRMS ~ 30 nm) needed for sensitive optofluidic devices.
Keywords :
integrated optics; micro-optomechanical devices; microchannel flow; microlenses; optical polymers; cryogenically-etched silicon molds; integration optics; liquid-turned-solid lenses; microfluidic channels; on-chip polymer optics; optical-quality sidewalls; polymer device; sensitive optofluidic device; surface losses; Biomedical optical imaging; Etching; Lenses; Optical devices; Optical polymers; Optical refraction; Optical scattering; Optical sensors; Optical variables control; Optical waveguides; (130.5460) Polymer Waveguides; (230.3120) Integrated Optics Devices;
Conference_Titel :
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-869-8
Electronic_ISBN :
978-1-55752-869-8
