Title :
The role of native and transient laser-induced defects in the femtosecond breakdown of dielectric films
Author :
Emmert, Luke A. ; Nguyen, Duy ; Mero, Mark ; Rudolph, Wolfgang ; Patel, Dinesh ; Krous, Eric ; Menoni, Carmen S.
Author_Institution :
Dept. of Phys. & Astron., Univ. of New Mexico, Albuquerque, NM, USA
Abstract :
Experiments and modeling reveal that the dielectric breakdown of hafnia films is controlled by laser induced and native defects under multiple femtosecond pulse exposure. Transient processes occur on a 100 ps and 10 ms timescale.
Keywords :
dielectric thin films; electric breakdown; hafnium compounds; laser beam effects; HfO2; dielectric films; femtosecond breakdown; femtosecond pulse exposure; native defects; time 100 ps; transient laser-induced defects; Conducting materials; Dielectric breakdown; Dielectric films; Electric breakdown; Electrons; Laser ablation; Laser theory; Optical films; Optical pulses; Ultrafast optics; (140.3440) laser-induced breakdown; (310.6860) thin films, optical properties;
Conference_Titel :
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-869-8
Electronic_ISBN :
978-1-55752-869-8
