70nm resolution in sub-surface two-photon optical beam induced current microscopy through pupil-function engineering in the vectorial focusing regime

Author

Serrels, K.A. ; Ramsay, E. ; Reid, Eric T.

Author_Institution

Sch. of Eng. & Phys. Sci., Heriot-Watt Univ., Edinburgh, UK

fYear

2009

fDate

2-4 June 2009

Firstpage

1

Lastpage

2

Abstract

We present experimental evidence for the resolution-enhancing effect of an annular pupil-plane aperture in two-photon semiconductor microscopy in the vectorial-focusing regime. At an illumination wavelength of 1550 nm we achieved a resolution of 70 nm (lambda/22).

Keywords

OBIC; failure analysis; image resolution; integrated circuit reliability; integrated circuit testing; monolithic integrated circuits; optical focusing; optical microscopy; two-photon processes; annular pupil-plane aperture; failure analysis; integrated circuits; pupil-function engineering; resolution-enhancing effect; subsurface optical beam; two-photon optical beam induced current microscopy; two-photon semiconductor microscopy; vectorial focusing regime; vectorial-focusing regime; wavelength 1550 nm; Apertures; Focusing; Image resolution; Lenses; Nonlinear optics; Optical beams; Optical imaging; Optical microscopy; Silicon; Ultrafast optics; (110.1220) Apertures; (180.4315) Nonlinear Microscopy; (350.5730) Resolution;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on

Conference_Location

Baltimore, MD

Print_ISBN

978-1-55752-869-8

Electronic_ISBN

978-1-55752-869-8

Type

conf

Filename

5225245