Temperature-insensitive silicon microdisk resonators using polymeric cladding layers

Author

Alipour, Payam ; Hosseini, Ehsan Shah ; Eftekhar, Ali Asghar ; Momeni, Babak ; Adibi, Ali

Author_Institution

Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA

fYear

2009

fDate

2-4 June 2009

Firstpage

1

Lastpage

2

Abstract

A method for thermal-stabilization of silicon microdisk resonators, based on thermooptic polymer coatings, is proposed. Two orders of magnitude improvement in thermal stability is expected. Effects on Q and major fabrication challenges are discussed.

Keywords

antireflection coatings; elemental semiconductors; integrated optics; micro-optomechanical devices; microcavities; micromechanical resonators; optical fabrication; optical polymers; optical resonators; silicon; thermal stability; thermo-optical effects; Q factor; Si; integrated optics device; optical fabrication; polymeric cladding layer; silicon microdisk resonator; thermal stability; thermooptic polymer coating; Integrated optics; Optical device fabrication; Optical devices; Optical filters; Optical polymers; Optical resonators; Polymer films; Resonance; Silicon; Thermal stability; (130.3120) integrated optics devices; (130.3130) Integrated optics materials;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on

Conference_Location

Baltimore, MD

Print_ISBN

978-1-55752-869-8

Electronic_ISBN

978-1-55752-869-8

Type

conf

Filename

5225706