Broadband measurement of ESD risetimes to distinguish between different discharge mechanisms

Different discharge mechanisms are possible for ESD (electrostatic discharge) below 2 kV breakdown voltage as a function of the parameters gap distance, breakdown voltage, electrode material and gas pressure. In this paper, risetime measurement data of electrostatic discharges, measured at about 8 GHz bandwidth, are presented as a function of these parameters. Electrode SEM photographs (scanning electron microscope) helps to understand the influence of electrode surface. This provides information about the development of ESD and helps to increase their reproducibility.