• DocumentCode
    501902
  • Title

    Measurement of electrostatic generation in semiconductor processing fluids as a result of pumping through insulative pumps and tubing

  • Author

    Newberg, Carl

  • Author_Institution
    River´´s Edge Tech. Service, Rochester, MN, USA
  • fYear
    2001
  • fDate
    11-13 Sept. 2001
  • Firstpage
    152
  • Lastpage
    158
  • Abstract
    The voltage generation in six different semiconductor processing fluids; air, deionized water, methanol, isopropanol, Aleg-310reg and REZI-28reg, was evaluated as they were pumped through a PTFE pump and tubing. It was found that more voltage was generated in the ungrounded fluids during operator contact with the pump and tubing than was generated during the pumping operation.
  • Keywords
    air; electrostatics; organic compounds; pumps; semiconductor technology; water; Aleg-310; REZI-28; air; deionized water; electrostatic generation; insulative pumps; isopropanol; methanol; polytetrafluoroethylene; pumping; semiconductor processing fluids; static electricity; tubing; voltage generation; Contamination; Electrostatic discharge; Electrostatic measurements; Flammability; Insulation; Methanol; Pollution measurement; Pumps; Resists; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical Overstress/Electrostatic Discharge Symposium, 2001. EOS/ESD '01.
  • Conference_Location
    Portland, OR
  • Print_ISBN
    978-1-5853-7039-9
  • Electronic_ISBN
    978-1-5853-7039-9
  • Type

    conf

  • Filename
    5254974
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=501902