DocumentCode :
501902
Title :
Measurement of electrostatic generation in semiconductor processing fluids as a result of pumping through insulative pumps and tubing
Author :
Newberg, Carl
Author_Institution :
River´´s Edge Tech. Service, Rochester, MN, USA
fYear :
2001
fDate :
11-13 Sept. 2001
Firstpage :
152
Lastpage :
158
Abstract :
The voltage generation in six different semiconductor processing fluids; air, deionized water, methanol, isopropanol, Aleg-310reg and REZI-28reg, was evaluated as they were pumped through a PTFE pump and tubing. It was found that more voltage was generated in the ungrounded fluids during operator contact with the pump and tubing than was generated during the pumping operation.
Keywords :
air; electrostatics; organic compounds; pumps; semiconductor technology; water; Aleg-310; REZI-28; air; deionized water; electrostatic generation; insulative pumps; isopropanol; methanol; polytetrafluoroethylene; pumping; semiconductor processing fluids; static electricity; tubing; voltage generation; Contamination; Electrostatic discharge; Electrostatic measurements; Flammability; Insulation; Methanol; Pollution measurement; Pumps; Resists; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 2001. EOS/ESD '01.
Conference_Location :
Portland, OR
Print_ISBN :
978-1-5853-7039-9
Electronic_ISBN :
978-1-5853-7039-9
Type :
conf
Filename :
5254974
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=501902
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