Title :
Controlling ESD damage of ICs at various steps of back-end process
Author :
Marley, John ; Tan, David ; Kraz, Vladimir
Author_Institution :
Xilinx, Inc., San Jose, CA, USA
Abstract :
In this work we study the methodology of ESD Event identification and their correlation with operation of equipment at various stages of the back end IC manufacturing. Survey of ESD environment in terms of exposure of ICs to known strength of ESD Events is described. Such correlation is instrumental in identification of sources of ESD damage and in setting up and maintaining ESD-safe environment.
Keywords :
electrostatic discharge; integrated circuit manufacture; occupational safety; ESD Event identification; ESD damage control; ESD-safe environment; back end IC manufacturing; electrostatic discharge; Costs; Electrostatic discharge; Energy measurement; Fault location; Logic; Manufacturing; Pins; Protection; Pulse measurements; Testing;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 2001. EOS/ESD '01.
Conference_Location :
Portland, OR
Print_ISBN :
978-1-5853-7039-9
Electronic_ISBN :
978-1-5853-7039-9
