Transmission line pulse (TLP) testing of radio frequency (RF) micro-machined micro-electromechanical systems (MEMS) switches

Author

Tazzoli, A. ; Peretti, V. ; Zanoni, E. ; Meneghesso, G.

Author_Institution

Dept. of Inf. Eng., Univ. of Padova, Padova, Italy

fYear

2006

fDate

10-15 Sept. 2006

Firstpage

295

Lastpage

303

Abstract

Radio frequency micro-electromechanical (RF-MEM) switches, both ohmic and capacitive, are important for future RF wired and wireless communication systems. In this paper, transmission line pulse testing and ESD characterization is shown for the first time. A new TLP methodology, an extension to classical TLP plot analysis, is presented and it is demonstrated as this new technique is necessary to correctly investigate the TLP response of RF-MEMS switches.

Keywords

electrostatic discharge; microswitches; microwave switches; radiocommunication; transmission lines; ESD characterization; MEMS switch; micromachined microelectromechanical systems; radio frequency switch; transmission line pulse testing; wireless communication system; Communication switching; Electrostatic discharge; Microelectromechanical systems; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Switches; System testing; Transmission lines; Wireless communication;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Overstress/Electrostatic Discharge Symposium, 2006. EOS/ESD '06.

Conference_Location

Anaheim, CA

Print_ISBN

978-1-5853-7115-0

Type

conf

Filename

5256768