DocumentCode
502586
Title
Solution of destructive separation charge generation
Author
Nakanishi, C.
Author_Institution
Nippon Fusso Co., Ltd., Sakai, Japan
fYear
2006
fDate
10-15 Sept. 2006
Firstpage
260
Lastpage
265
Abstract
Separation charge in handling LCD glass substrate and wafers has become a serious problem. That problematic charge is generated when a glass substrate or wafer is lifted and separates from a holding vacuum stage. The charge causes transfer problem, or worse, results in a spark discharge. Several surface finishes to prevent separation charge are compared, including new charge prevention fluoropolymer coatings.
Keywords
liquid crystal displays; optical films; optical glass; optical polymers; sparks; LCD glass substrate; LCD wafers; charge prevention; destructive separation charge generation; fluoropolymer coatings; holding vacuum stage; liquid crystal display; spark discharge; surface finishes; transfer problem; Coatings; Contacts; Electrostatic discharge; Glass; Manufacturing industries; Production; Rough surfaces; Sparks; Substrates; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Overstress/Electrostatic Discharge Symposium, 2006. EOS/ESD '06.
Conference_Location
Anaheim, CA
Print_ISBN
978-1-5853-7115-0
Type
conf
Filename
5256772
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