Title :
Development of ion balance sensor by using MOSFET
Author :
Sakuyarna, M. ; Takeuchi, M. ; Terashige, T. ; Yoshioka, S. ; Okano, K.
Author_Institution :
Ibaraki Univ., Hitachi, Japan
Abstract :
A new ion balance sensor was developed in order to control ion generation of an air ionizer. The sensor, in spite of its very slmple structure, can detect the ion balance instantly with enough sensitivity, with a shorter response tune and a higher spatial resolution compared to a charge plate monitor. An air ionizer control system that can generate specific quantity of ions at desired locations can be easily implemented by using feedback of the sensed signal to the air ionizer.
Keywords :
MOSFET; electric variables measurement; semiconductor device measurement; sensors; MOSFET; air ionizer; charge plate monitor; ion balance sensor; ion generation; Control systems; Delay; Inspection; MOSFET circuits; Manufacturing processes; Monitoring; Semiconductor device manufacture; Sensor phenomena and characterization; Spatial resolution; Voltage;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 2006. EOS/ESD '06.
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-5853-7115-0