Title :
Effect of the n+sinker in self-triggering bipolar ESD protection structures
Author :
De Heyn, Vincent ; Iyer, Natarajan M ; Groeseneken, Guido ; Reynders, Koen ; Moens, Peter
Author_Institution :
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
Abstract :
A detailed analysis of the n+sinker module influence on self-triggered bipolar ESD protection structures is presented. Current and electric field distribution are analysed to understand the influence of the sinker on the electrical behaviour of devices processed with and without n+sinker. Measurements and thermoelectrical simulations are presented to investigate the heating generation appearing in the devices.
Keywords :
Batteries; CMOS technology; Charge pumps; Current measurement; Electrostatic discharge; Leakage current; Microelectronics; Protection; Pulse measurements; Voltage;
Conference_Titel :
2002 Electrical Overstress/Electrostatic Discharge Symposium, 2002. EOS/ESD '02.
Conference_Location :
Charlotte, NC, USA
Print_ISBN :
978-1-5853-7040-5
Electronic_ISBN :
978-1-5853-7040-5
