ESD control in automated placement process

ESD control in automated placement process has been studied. New principles for placement equipment design, going beyond those given in ANSI/ESD S20.20 and ESD SP10.1, are suggested. In analogy to ESD packaging materials, three classes of parts, materials and surfaces in an AHE are defined: intimate, proximity, and secondary equipment parts, materials and surfaces. Methods for the evaluation of ESD safety are presented, and an example of ESD safety evaluation of placement process, applying the measurement of real discharge current waveforms of devices being processed, is given.