Title :
SCR operation mode of diode strings for ESD protection
Author :
Glaser, Ulrich ; Esmark, Kai ; Streibl, Martin ; Russ, Christian ; Domanski, Krzysztof ; Ciappa, Mauro ; Fichtner, Wolfgang
Author_Institution :
Integrated Syst. Lab., ETH Zurich, Zurich, Switzerland
Abstract :
Diodes and diode strings in 90 nm and beyond technologies are investigated by measurement and device simulation. After a thorough calibration, the device simulator is utilised to achieve a better understanding and an enhanced device performance of diode strings under DC and transient ESD conditions. Thereto, parasitic transistors and a so far neglected parasitic thyristor (SCR) in the diode string are exploited and optimised.
Keywords :
diodes; electrostatic discharge; semiconductor device measurement; semiconductor device models; thyristors; ESD protection; SCR operation mode; device simulation; diode strings; measurement; parasitic thyristor; size 90 nm; Anodes; CMOS technology; Calibration; Cathodes; Circuit simulation; Diodes; Electrostatic discharge; Protection; Pulsed power supplies; Thyristors;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 2005. EOS/ESD '05.
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-58537-069-6
Electronic_ISBN :
978-1-58537-069-6
