Biased-plate characterization of pulsed DC ionizers

Author

Crowley, Joseph M. ; Ignatenko, Alexander ; Levit, Larry B.

Author_Institution

Electrostatic Applic., Morgan Hill, CA, USA

fYear

2003

fDate

21-25 Sept. 2003

Firstpage

1

Lastpage

6

Abstract

The operation of a pulsed DC air ionization system was studied in a side-by-side comparison using a charged-plate monitor (CPM) and a biased-plate monitor (BPM). When the pulse period is short compared to the decay time, both methods give equivalent results. When the pulse is not short, however, the CPM suffers from a random error on the order of the pulse period. In addition, the CPM method is quite sensitive to the motion of persons and other objects in its vicinity. Neither of these errors occurs with the BPM, which therefore provides a significantly faster way of adjusting pulsed DC ionizers.

Keywords

clean rooms; discharges (electric); equivalent circuits; ionisation; biased-plate characterization; charged-plate monitor; equivalent electrical circuit; pulsed DC air ionization system; pulsed DC ionizers; random error; Current measurement; Delay; Electric resistance; Electric variables measurement; Electrical resistance measurement; Electrostatic discharge; Equivalent circuits; Ionization; Monitoring; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Overstress/Electrostatic Discharge Symposium, 2003. EOS/ESD '03.

Conference_Location

Las Vegas, NV

Print_ISBN

978-1-5853-7057-3

Electronic_ISBN

978-1-5853-7057-3

Type

conf

Filename

5272012