STMSCR: A new multi-finger SCR-based protection structure against ESD

This paper introduces a new SCR-based structure for ESD protection. The STMSCR relies on the bimodal operation of a LSCR with minimum design rule dimensions: an external triggering circuitry permits switching from a transparency mode to a protection mode as soon as an ESD event is detected. The trigger voltage can then be adjusted by design without any impact on the ESD performances. The STMSCR is multifinger compliant, thus allowing area-efficient design of pad-located ESD protection. The STMSCR is demonstrated in a 0.18 mum-CMOS technology without any process customization, an HBM failure threshold over 115 V/mum is reached while always ensuring current uniformity in multi-finger structures.