Title :
Three element gas flow sensor integrated with Low Temperature Cofired Ceramic (LTCC) module
Author :
Jurków, Dominik ; Malecha, Karol ; Golonka, Leszek
Author_Institution :
Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland
Abstract :
The technology, simulation and basic calibration process of three component gas flow sensor, which is integrated with Low Temperature Cofired Ceramic, are presented in the paper. Geometry of the flow sensor is designed on the basis of FEM (Finite Element Method) calculations. The basic sensor parameters, such as measuring range, sensitivity, repeatability and hysteresis are described.
Keywords :
calibration; ceramics; finite element analysis; flow sensors; gas sensors; low-temperature techniques; FEM calculations; calibration process; finite element method; gas flow sensor; hysteresis; low temperature cofired ceramic module; measuring range; repeatability; sensitivity; Calibration; Ceramics; Finite element methods; Fluid flow; Gas detectors; Geometry; Hysteresis; Paper technology; Sensor phenomena and characterization; Temperature sensors; LTCC; measurement; sensor; thermal; thermistor;
Conference_Titel :
Mixed Design of Integrated Circuits & Systems, 2009. MIXDES '09. MIXDES-16th International Conference
Conference_Location :
Lodz
Print_ISBN :
978-1-4244-4798-5
Electronic_ISBN :
978-83-928756-1-1
