DocumentCode
503272
Title
Three element gas flow sensor integrated with Low Temperature Cofired Ceramic (LTCC) module
Author
Jurków, Dominik ; Malecha, Karol ; Golonka, Leszek
Author_Institution
Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland
fYear
2009
fDate
25-27 June 2009
Firstpage
493
Lastpage
496
Abstract
The technology, simulation and basic calibration process of three component gas flow sensor, which is integrated with Low Temperature Cofired Ceramic, are presented in the paper. Geometry of the flow sensor is designed on the basis of FEM (Finite Element Method) calculations. The basic sensor parameters, such as measuring range, sensitivity, repeatability and hysteresis are described.
Keywords
calibration; ceramics; finite element analysis; flow sensors; gas sensors; low-temperature techniques; FEM calculations; calibration process; finite element method; gas flow sensor; hysteresis; low temperature cofired ceramic module; measuring range; repeatability; sensitivity; Calibration; Ceramics; Finite element methods; Fluid flow; Gas detectors; Geometry; Hysteresis; Paper technology; Sensor phenomena and characterization; Temperature sensors; LTCC; measurement; sensor; thermal; thermistor;
fLanguage
English
Publisher
ieee
Conference_Titel
Mixed Design of Integrated Circuits & Systems, 2009. MIXDES '09. MIXDES-16th International Conference
Conference_Location
Lodz
Print_ISBN
978-1-4244-4798-5
Electronic_ISBN
978-83-928756-1-1
Type
conf
Filename
5289660
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