Title :
Injected charge distribution in thin films of polymethylmethacrylate
Author :
Smolar, V.A. ; Sitnikov, A.S.
Author_Institution :
Volgograd State Tech. Univ., Volgograd, Russia
Abstract :
A possibility of application of an scanning electron microscope for injection of the charge into thin films of the polymethylmethacrylate (PMMA) located on well spending substrates is observed. Resolution capability of this structure depends on proximity effect of an electron beam. And this effect must be estimated. For this estimation an analytical model combining small-angle and diffusive approximations of initial Boltzmann equation is proposed.
Keywords :
Boltzmann equation; charge injection; polymer films; scanning electron microscopy; PMMA thin films; diffusive approximations; initial Boltzmann equation; injected charge distribution; polymethylmethacrylate thin films; proximity effect estimation; scanning electron microscope application; small-angle approximations; Helium; IEEE catalog; Indium tin oxide; Light emitting diodes; Neutron spin echo; Organizing; Transistors;
Conference_Titel :
Microwave & Telecommunication Technology, 2009. CriMiCo 2009. 19th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-1-4244-4796-1
