• DocumentCode
    503445
  • Title

    Injected charge distribution in thin films of polymethylmethacrylate

  • Author

    Smolar, V.A. ; Sitnikov, A.S.

  • Author_Institution
    Volgograd State Tech. Univ., Volgograd, Russia
  • fYear
    2009
  • fDate
    14-18 Sept. 2009
  • Firstpage
    621
  • Lastpage
    622
  • Abstract
    A possibility of application of an scanning electron microscope for injection of the charge into thin films of the polymethylmethacrylate (PMMA) located on well spending substrates is observed. Resolution capability of this structure depends on proximity effect of an electron beam. And this effect must be estimated. For this estimation an analytical model combining small-angle and diffusive approximations of initial Boltzmann equation is proposed.
  • Keywords
    Boltzmann equation; charge injection; polymer films; scanning electron microscopy; PMMA thin films; diffusive approximations; initial Boltzmann equation; injected charge distribution; polymethylmethacrylate thin films; proximity effect estimation; scanning electron microscope application; small-angle approximations; Helium; IEEE catalog; Indium tin oxide; Light emitting diodes; Neutron spin echo; Organizing; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave & Telecommunication Technology, 2009. CriMiCo 2009. 19th International Crimean Conference
  • Conference_Location
    Sevastopol
  • Print_ISBN
    978-1-4244-4796-1
  • Type

    conf

  • Filename
    5292960