• DocumentCode
    503481
  • Title

    Development of etch liquid processes of complex profile silicon elements for VHF-devices

  • Author

    Timoshenkov, S.P. ; Kalugin, V.V. ; Klochko, A.V. ; Kalugina, I.V.

  • Author_Institution
    Moscow Inst. of Electron. Technol., Tech. Univ., Moscow, Russia
  • fYear
    2009
  • fDate
    14-18 Sept. 2009
  • Firstpage
    554
  • Lastpage
    555
  • Abstract
    Results of study and development of technological processes of liquid etching of the silicon micromechanical elements (MME) of microelectromechanical systems (MEMS) for VHF devices are submitted.
  • Keywords
    VHF devices; etching; micromechanical devices; VHF devices; complex profile silicon elements; etch liquid processes; liquid etching; microelectromechanical systems; silicon micromechanical elements; Etching; Galvanizing; Helium; Lithography; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave & Telecommunication Technology, 2009. CriMiCo 2009. 19th International Crimean Conference
  • Conference_Location
    Sevastopol
  • Print_ISBN
    978-1-4244-4796-1
  • Type

    conf

  • Filename
    5293000
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=503481