Title :
Development of etch liquid processes of complex profile silicon elements for VHF-devices
Author :
Timoshenkov, S.P. ; Kalugin, V.V. ; Klochko, A.V. ; Kalugina, I.V.
Author_Institution :
Moscow Inst. of Electron. Technol., Tech. Univ., Moscow, Russia
Abstract :
Results of study and development of technological processes of liquid etching of the silicon micromechanical elements (MME) of microelectromechanical systems (MEMS) for VHF devices are submitted.
Keywords :
VHF devices; etching; micromechanical devices; VHF devices; complex profile silicon elements; etch liquid processes; liquid etching; microelectromechanical systems; silicon micromechanical elements; Etching; Galvanizing; Helium; Lithography; Silicon;
Conference_Titel :
Microwave & Telecommunication Technology, 2009. CriMiCo 2009. 19th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-1-4244-4796-1
