Experimental and Theoretical Study of Transition Between Glow Modes of Planar Barrier Capacitive RF Discharge in Argon at One Atmosphere Pressure

Author

Bazhenov, Volodymir Yu ; Kuzmichev, Anatoliy I. ; Tsiolko, Vyacheslav V. ; Chaplinskiy, Roman Yu ; Piun, Viktor M.

Author_Institution

Inst. of Phys., Kiev, Ukraine

Volume

43

Issue

3

fYear

2015

fDate

Mar-15

Firstpage

760

Lastpage

764

Abstract

Characteristics of planar barrier radio frequency (RF) discharge in different modes at atmospheric pressure of Ar have been studied experimentally and theoretically. Experimental data, as well as results of numeric simulation, have shown a presence of transient mode of the discharge glow, which is due to coexistence of low-current α and high-current γ discharge modes with occurrence of a transition between the modes during each half cycle of RF voltage supplied to the discharge.

Keywords

glow discharges; high-frequency discharges; numerical analysis; plasma simulation; atmosphere pressure; discharge glow; high-current γ discharge modes; low-current α discharge modes; numeric simulation; planar barrier radiofrequency discharge characteristics; pressure 1 atm; Argon; Atmospheric modeling; Current density; Dielectrics; Discharges (electric); Plasmas; Radio frequency; Argon; atmospheric pressure; numerical simulation; plasma properties; radio frequency (RF) discharge; radio frequency (RF) discharge.;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2014.2359736

Filename

6963414