Macro-micro bilateral control with friction-free structure

Micro manipulation technology is demanded for many fields such as engineering, medical fields, and biological disciplines. Macro-micro bilateral control is essential technique to realize micro manipulation with force feedback. However, viscosity friction in micro environment is problem when the system conducts unconstrained motion. Moreover, the signal noise of position encoder is also problems. This paper proposes the cancellation of viscosity friction and signal noise by using differential mode of force and position in slave system. The pure grip force is able to get by the cancellation of viscosity friction. The viability of the proposed method are shown by some experimental results.