DocumentCode
505350
Title
SNOM measurements on metalic nanostructures
Author
Kusko, C. ; Dinescu, A. ; Rebigan, R. ; Kusko, M. ; Cristea, D.
Author_Institution
IMT-Bucharest, Bucharest, Romania
Volume
1
fYear
2009
fDate
12-14 Oct. 2009
Firstpage
197
Lastpage
200
Abstract
We present transmission and reflection near field scanning optical microscopy (SNOM) images on a metallic nanostructure realized by a combination of electron beam lithography (EBL) patterning and liftoff procedure. The structure consists in a square lattice of gold disks of 80 nm height with the diameter of 200 nm and the lattice constant of 400 nm. FDTD simulations were used in order to understand the interaction of the optical near field with the nanostructure and to interpret the SNOM reflection images.
Keywords
electron beam lithography; finite difference time-domain analysis; gold; nanofabrication; nanolithography; nanostructured materials; near-field scanning optical microscopy; plasmonics; Au; EBL patterning; FDTD simulations; SNOM image reflection; electron beam lithography; lattice constant; liftoff process; metallic nanostructure; reflection near field scanning optical microscopy; size 200 nm; size 80 nm; transmission near field scanning optical microscopy; Electron beams; Electron optics; Gold; Lattices; Lithography; Nanostructures; Optical microscopy; Optical reflection; Scanning electron microscopy; Transmission electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2009. CAS 2009. International
Conference_Location
Sinaia
ISSN
1545-827X
Print_ISBN
978-1-4244-4413-7
Type
conf
DOI
10.1109/SMICND.2009.5336574
Filename
5336574
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