• DocumentCode
    505351
  • Title

    Design of an optical switch based on electrostatic actuation of a movable fiber

  • Author

    Kusko, M. ; Voicu, R. ; Tibeica, C.

  • Author_Institution
    Nat. Inst. for R&D in Microtechnol., Bucharest, Romania
  • Volume
    1
  • fYear
    2009
  • fDate
    12-14 Oct. 2009
  • Firstpage
    181
  • Lastpage
    184
  • Abstract
    In this paper is presented a theoretical study on two variants of mechanical optical switches based on movable metallized fiber electrostatic actuation. The first variant is based on circular section electrodes (copper wires). The second variant is based on planar electrodes. Here is presented the lay-out, the proposed fabrication flux and the simulation results.
  • Keywords
    micro-optomechanical devices; optical design techniques; optical fibres; optical switches; circular section electrodes; copper wires; electrostatic actuation; micromechanical optical switches; movable metallized fiber; planar electrodes; Breakdown voltage; Communication switching; Electrodes; Electrostatic actuators; Metallization; Micromechanical devices; Optical design; Optical fibers; Optical switches; Wires;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 2009. CAS 2009. International
  • Conference_Location
    Sinaia
  • ISSN
    1545-827X
  • Print_ISBN
    978-1-4244-4413-7
  • Type

    conf

  • DOI
    10.1109/SMICND.2009.5336575
  • Filename
    5336575
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=505351