Surface Acoustic Wave devices and their sensing capabilities

Author

Avramescu, Viorel ; Bostan, C. ; Serban, B. ; Georgescu, I. ; Costea, S. ; Varachiu, N. ; Cobianu, C.

Author_Institution

Sensors & Wireless Lab., Honeywell Romania s.r.l., Romania

Volume

1

fYear

2009

fDate

12-14 Oct. 2009

Firstpage

27

Lastpage

36

Abstract

Since mid 60s, Surface Acoustic Wave (SAW) devices have been using extensively in electronics for telecommunication. However, their potential use in the sensors field is only a matter of recent interest. This paper presents an overview of the sensing mechanisms that allow detection of temperature, strain (for pressure & torque), mass, conductivity (e.g. gas detection) and viscosity by means of SAW based devices. Design and technological challenges are presented, as well as solutions to overcome them in order to obtain reliable devices. The possibility of using such devices as passive wireless sensors is also discussed.

Keywords

distributed sensors; electrical conductivity measurement; mass measurement; strain sensors; surface acoustic wave sensors; temperature sensors; viscosity measurement; SAW devices; conductivity detection; mass detection; passive wireless sensors; sensing mechanism; strain detection; surface acoustic wave devices; temperature detection; viscosity detection; Acoustic sensors; Acoustic signal detection; Acoustic waves; Capacitive sensors; Conductivity; Surface acoustic wave devices; Surface acoustic waves; Temperature sensors; Torque; Viscosity;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 2009. CAS 2009. International

Conference_Location

Sinaia

ISSN

1545-827X

Print_ISBN

978-1-4244-4413-7

Type

conf

DOI

10.1109/SMICND.2009.5336615

Filename

5336615