Title :
Dynamics of a close loop controlled MEMS actuator
Author :
Seleim, Abdulrahman ; Abdel-Rahman, Eihab ; Heppler, Glenn
Author_Institution :
Systems Design Engineering, University of Waterloo, Ontario, Canada
Abstract :
A nonlinear controller is added to a micro cantilever beam to develop a steady-state chaotic actuator. Bifurcation diagrams are obtained for the resulting MEMS actuator at two different input voltage amplitudes with the frequency of excitation as a control parameter. Chaos, transient chaos, superharmonic resonances and coexisting attractors are observed.
Keywords :
Bifurcation; Chaos; MEMS control;
Conference_Titel :
Microsystems and Nanoelectronics Research Conference, 2009. MNRC 2009. 2nd
Conference_Location :
Ottawa, ON, Canada
Print_ISBN :
978-1-4244-4751-0
