• DocumentCode
    505427
  • Title

    Dynamics of a close loop controlled MEMS actuator

  • Author

    Seleim, Abdulrahman ; Abdel-Rahman, Eihab ; Heppler, Glenn

  • Author_Institution
    Systems Design Engineering, University of Waterloo, Ontario, Canada
  • fYear
    2009
  • fDate
    13-14 Oct. 2009
  • Firstpage
    120
  • Lastpage
    123
  • Abstract
    A nonlinear controller is added to a micro cantilever beam to develop a steady-state chaotic actuator. Bifurcation diagrams are obtained for the resulting MEMS actuator at two different input voltage amplitudes with the frequency of excitation as a control parameter. Chaos, transient chaos, superharmonic resonances and coexisting attractors are observed.
  • Keywords
    Bifurcation; Chaos; MEMS control;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Microsystems and Nanoelectronics Research Conference, 2009. MNRC 2009. 2nd
  • Conference_Location
    Ottawa, ON, Canada
  • Print_ISBN
    978-1-4244-4751-0
  • Type

    conf

  • Filename
    5338946