DocumentCode
505427
Title
Dynamics of a close loop controlled MEMS actuator
Author
Seleim, Abdulrahman ; Abdel-Rahman, Eihab ; Heppler, Glenn
Author_Institution
Systems Design Engineering, University of Waterloo, Ontario, Canada
fYear
2009
fDate
13-14 Oct. 2009
Firstpage
120
Lastpage
123
Abstract
A nonlinear controller is added to a micro cantilever beam to develop a steady-state chaotic actuator. Bifurcation diagrams are obtained for the resulting MEMS actuator at two different input voltage amplitudes with the frequency of excitation as a control parameter. Chaos, transient chaos, superharmonic resonances and coexisting attractors are observed.
Keywords
Bifurcation; Chaos; MEMS control;
fLanguage
English
Publisher
iet
Conference_Titel
Microsystems and Nanoelectronics Research Conference, 2009. MNRC 2009. 2nd
Conference_Location
Ottawa, ON, Canada
Print_ISBN
978-1-4244-4751-0
Type
conf
Filename
5338946
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