• DocumentCode
    505443
  • Title

    Mass measurement with micromechanical single harmonic oscillators

  • Author

    Chow, Jacky ; Lai, Yongjun

  • Author_Institution
    Department of Mechanical and Materials Engineering, Queen´s University, Kingston ON, Canada K7L 3N6
  • fYear
    2009
  • fDate
    13-14 Oct. 2009
  • Firstpage
    57
  • Lastpage
    60
  • Abstract
    A concept for measuring the inertial mass of analyte matter using single harmonically excited micromechanical oscillators is presented. Proof-of-concept experiments with micron-scale cantilevers demonstrated mass detection of structurally loaded gold via oscillation amplitude variations of the harmonically excited microstructures. The concept is contrasted with a conventional resonance frequency shift mass measurement technique involving frequency sweep excitations.
  • Keywords
    Cantilever; Harmonic Oscillator; MEMS Sensor; Mass Measurement; Resonance Frequency Shift;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Microsystems and Nanoelectronics Research Conference, 2009. MNRC 2009. 2nd
  • Conference_Location
    Ottawa, ON, Canada
  • Print_ISBN
    978-1-4244-4751-0
  • Type

    conf

  • Filename
    5338962
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=505443