DocumentCode
505527
Title
Modeling the effect of charge injection due to ESD in MEMS
Author
Greason, William D.
Author_Institution
Appl. Electrostatics Res. Centre, Univ. of Western Ontario, London, ON, Canada
fYear
2009
fDate
Aug. 30 2009-Sept. 4 2009
Firstpage
1
Lastpage
7
Abstract
A model is developed to analyze the effect of injected charge due to ESD in MEMS. The contribution to electric fields and potential drops in the air gap and dielectric layer due to control voltage and trapped charge are calculated as a function of switch state. Conditions for stiction and dielectric breakdown are presented.
Keywords
electric breakdown; electrostatic discharge; micromechanical devices; ESD; MEMS; charge injection; dielectric breakdown; dielectric layer; trapped charge; Biological system modeling; Capacitance; Dielectric breakdown; Electric potential; Electrostatic analysis; Electrostatic discharge; Humans; Micromechanical devices; Switches; Voltage control;
fLanguage
English
Publisher
ieee
Conference_Titel
EOS/ESD Symposium, 2009 31st
Conference_Location
Anaheim, CA
Print_ISBN
978-1-58537-176-1
Electronic_ISBN
978-1-58537-176-1
Type
conf
Filename
5340114
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