Title :
Modeling the effect of charge injection due to ESD in MEMS
Author :
Greason, William D.
Author_Institution :
Appl. Electrostatics Res. Centre, Univ. of Western Ontario, London, ON, Canada
fDate :
Aug. 30 2009-Sept. 4 2009
Abstract :
A model is developed to analyze the effect of injected charge due to ESD in MEMS. The contribution to electric fields and potential drops in the air gap and dielectric layer due to control voltage and trapped charge are calculated as a function of switch state. Conditions for stiction and dielectric breakdown are presented.
Keywords :
electric breakdown; electrostatic discharge; micromechanical devices; ESD; MEMS; charge injection; dielectric breakdown; dielectric layer; trapped charge; Biological system modeling; Capacitance; Dielectric breakdown; Electric potential; Electrostatic analysis; Electrostatic discharge; Humans; Micromechanical devices; Switches; Voltage control;
Conference_Titel :
EOS/ESD Symposium, 2009 31st
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-58537-176-1
Electronic_ISBN :
978-1-58537-176-1
