Title :
A study of breakdown mechanisms in electrostatic actuators using mechanical response under EOS-ESD stress
Author :
Sangameswaran, Sandeep ; De Coster, Jeroen ; Scholz, Mirko ; Linten, Dimitri ; Thijs, Steven ; Van Hoof, Chris ; De Wolf, Ingrid ; Groeseneken, Guido
Author_Institution :
IMEC vzw, Heverlee, Belgium
fDate :
Aug. 30 2009-Sept. 4 2009
Abstract :
The mechanical response of electrostatic actuators during ESD stress has been measured in-situ and is reported for the first time. Two different breakdown mechanisms during ESD - air-gap breakdown and dielectric breakdown - have been distinguished. This has been achieved by simultaneously measuring electrical and mechanical quantities on the MEMS device under test.
Keywords :
electrostatic actuators; electrostatic discharge; failure analysis; EOS-ESD stress; MEMS device; air-gap breakdown; breakdown mechanisms; dielectric breakdown; electrical overstress; electrical quantities; electrostatic actuators; electrostatic discharge; mechanical quantities; mechanical response; microelectromechanical systems; Air gaps; Dielectric breakdown; Dielectric measurements; Electric breakdown; Electrostatic actuators; Electrostatic discharge; Electrostatic measurements; Mechanical variables measurement; Stress measurement; Time measurement;
Conference_Titel :
EOS/ESD Symposium, 2009 31st
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-58537-176-1
Electronic_ISBN :
978-1-58537-176-1
