Title :
Space charge balance sensing for static control
Author :
Tokunaga, Tetsuya ; Ikehata, Takashi ; Terashige, Takashi ; Arifin, Syamsul ; Okano, Kazuo
Author_Institution :
Ibaraki Univ., Hitachi, Japan
fDate :
Aug. 30 2009-Sept. 4 2009
Abstract :
Two types of sensing system for ion balance control were proposed and investigated base on the potential measurement and the current measurement. Their detection limits of ion balance were below 100 mV for each type. The response time tau of the current measurement type was 5 times shorter than the potential measurement type.
Keywords :
electric current measurement; electric sensing devices; measurement systems; space charge; current measurement; ion balance control; potential measurement; response time; sensing system; space charge balance sensing; static control; Antenna measurements; Charge measurement; Control systems; Current measurement; Electrodes; Electrostatic discharge; Manufacturing processes; Pollution measurement; Space charge; Voltage;
Conference_Titel :
EOS/ESD Symposium, 2009 31st
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-58537-176-1
Electronic_ISBN :
978-1-58537-176-1
