DocumentCode
505555
Title
Space charge balance sensing for static control
Author
Tokunaga, Tetsuya ; Ikehata, Takashi ; Terashige, Takashi ; Arifin, Syamsul ; Okano, Kazuo
Author_Institution
Ibaraki Univ., Hitachi, Japan
fYear
2009
fDate
Aug. 30 2009-Sept. 4 2009
Firstpage
1
Lastpage
4
Abstract
Two types of sensing system for ion balance control were proposed and investigated base on the potential measurement and the current measurement. Their detection limits of ion balance were below 100 mV for each type. The response time tau of the current measurement type was 5 times shorter than the potential measurement type.
Keywords
electric current measurement; electric sensing devices; measurement systems; space charge; current measurement; ion balance control; potential measurement; response time; sensing system; space charge balance sensing; static control; Antenna measurements; Charge measurement; Control systems; Current measurement; Electrodes; Electrostatic discharge; Manufacturing processes; Pollution measurement; Space charge; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
EOS/ESD Symposium, 2009 31st
Conference_Location
Anaheim, CA
Print_ISBN
978-1-58537-176-1
Electronic_ISBN
978-1-58537-176-1
Type
conf
Filename
5340142
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