Title :
Mass production of optoelectronic devices for Solid State Lighting (SSL) by MOCVD
Author_Institution :
AIXTRON AG, Aachen, Germany
fDate :
Oct. 30 2008-Nov. 2 2008
Abstract :
The advances in the optoelectronic market for SSL constantly demand a reduction of the production cost of devices. The Cost of Ownership of the MOCVD production tool is one of the key parameters. We addressed this issue by developing two new reactor configurations for the AIX2800G4 HT Planetary Reactor® (11 x 4 inch) and CRIUS® Close-Coupled-Showerhead (CCS) (12 × 3 inch) platforms.
Keywords :
MOCVD; chemical reactors; cost reduction; lighting; mass production; optoelectronic devices; AIX2800G4 HT Planetary Reactor; CRIUS; MOCVD; close-coupled-showerhead; mass production; optoelectronic devices; production cost reduction; solid state lighting; Carbon capture and storage; Costs; Extraterrestrial measurements; Inductors; MOCVD; Mass production; Optoelectronic devices; Solid state lighting; Thickness measurement; X-ray scattering;
Conference_Titel :
Optical Fiber Communication & Optoelectronic Exposition & Conference, 2008. AOE 2008. Asia
Conference_Location :
Shanghai
Print_ISBN :
978-1-55752-863-6
Electronic_ISBN :
978-1-55752-863-6
