• DocumentCode
    505738
  • Title

    Mass production of optoelectronic devices for Solid State Lighting (SSL) by MOCVD

  • Author

    Heuken, Michael

  • Author_Institution
    AIXTRON AG, Aachen, Germany
  • fYear
    2008
  • fDate
    Oct. 30 2008-Nov. 2 2008
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    The advances in the optoelectronic market for SSL constantly demand a reduction of the production cost of devices. The Cost of Ownership of the MOCVD production tool is one of the key parameters. We addressed this issue by developing two new reactor configurations for the AIX2800G4 HT Planetary Reactor® (11 x 4 inch) and CRIUS® Close-Coupled-Showerhead (CCS) (12 × 3 inch) platforms.
  • Keywords
    MOCVD; chemical reactors; cost reduction; lighting; mass production; optoelectronic devices; AIX2800G4 HT Planetary Reactor; CRIUS; MOCVD; close-coupled-showerhead; mass production; optoelectronic devices; production cost reduction; solid state lighting; Carbon capture and storage; Costs; Extraterrestrial measurements; Inductors; MOCVD; Mass production; Optoelectronic devices; Solid state lighting; Thickness measurement; X-ray scattering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber Communication & Optoelectronic Exposition & Conference, 2008. AOE 2008. Asia
  • Conference_Location
    Shanghai
  • Print_ISBN
    978-1-55752-863-6
  • Electronic_ISBN
    978-1-55752-863-6
  • Type

    conf

  • Filename
    5348563
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=505738