Title :
Optimization of nanoscale silicon waveguide fabrication
Author :
Chen, Yao ; Junbo Feng ; Zhou, Zhiping ; Yu, Jun ; Summers, Christopher J. ; Citrin, David S.
Author_Institution :
Wuhan Nat. Lab. for Optoelectron., Huazhong Univ. of Sci. & Technol., Wuhan, China
fDate :
Oct. 30 2008-Nov. 2 2008
Abstract :
A simple and effective technique was developed to improve the nanoscale silicon waveguide fabrication. 40 nanometer features with smooth and vertical sidewall are demonstrated. With this technique, nanoscale silicon grating coupler was obtained.
Keywords :
diffraction gratings; nanofabrication; nanophotonics; optical couplers; optical fabrication; silicon; Si; nanoscale silicon grating coupler; optimised nanoscale silicon waveguide fabrication; size 40 nm; Coils; Etching; Gratings; Lithography; Nanoscale devices; Optical device fabrication; Optical modulation; Optical waveguides; Plasma applications; Silicon;
Conference_Titel :
Optical Fiber Communication & Optoelectronic Exposition & Conference, 2008. AOE 2008. Asia
Conference_Location :
Shanghai
Print_ISBN :
978-1-55752-863-6
Electronic_ISBN :
978-1-55752-863-6
