Title :
Optical electrostatic MEMS for wavelength switching
Author_Institution :
Electr. & Comput. Eng. Dept., Dalhousie Univ., Halifax, NS, Canada
fDate :
Oct. 30 2008-Nov. 2 2008
Abstract :
An electrostatic micromirror is designed and fabricated using a standard MicroElectroMechanical Systems (MEMS) process. Active control approaches are proposed for driving actuation to eliminate micromirror ldquopull-inrdquo achieving enhanced device performance and functionality.
Keywords :
closed loop systems; electrostatic devices; micro-optomechanical devices; microfabrication; micromirrors; microswitches; nonlinear control systems; open loop systems; optical control; optical design techniques; optical fabrication; MEMS fabrication; active control approach; electrostatic micromirror; microelectromechanical system; nonlinear closed-loop control; open-loop electrode segment; optical electrostatic MEMS; wavelength switching; Electrodes; Electrostatics; Micromechanical devices; Micromirrors; Mirrors; Optical attenuators; Optical devices; Optical fiber networks; Stress; Switches;
Conference_Titel :
Optical Fiber Communication & Optoelectronic Exposition & Conference, 2008. AOE 2008. Asia
Conference_Location :
Shanghai
Print_ISBN :
978-1-55752-863-6
Electronic_ISBN :
978-1-55752-863-6
