Dual-polarized antenna based on MEMS technology for terahertz polarimetric radar

Planar integrated antenna has special advantages in Terahertz application, but with disadvantage of low gain. In this paper, a novel Terahertz integrated dual-polarized horn antenna at 900 GHz is proposed which can be used in a Terahertz polarimetric radar system. The processing of this type horn antenna combine two kind MEMS techniques, DRIE etch and wet etch. The structure of the horn include two parts, pyramid horn back cavity and octagonal horn front cavity. There are many tunable parameters of the horn. FEM method is used to analyze it, this new type integrated horn antenna can improve the radiate performance of planar integrated dual-polarized antenna elements.