Title :
Acceleration detecting using MOEMS ultrahigh Q Microcavities
Author :
Yan, Yingzhan ; Ji, Zhe ; Wang, Baohua ; Jiang, Guoqing ; Yan, Shubin ; Xiong, Jijun
Author_Institution :
National Key Laboratory For Electronic Measurement Technology, North University Of China, Taiyuan, China 030051
Abstract :
A novel acceleration detecting method using high-Q Microcavities is presented. Induced displacement due to the minute acceleration is monitored through resonant frequency shift of the microtoroid cavity coupled to a fixed coupling waveguide. Placing a piezoresistance on the root of cavity chip cantilever, a multi-ranged micro accelerometer can be designed.
Keywords :
Acceleration; Accelerometers; Couplings; Equations; Finite difference methods; Microcavities; Optical design; Optical sensors; Optical waveguides; Piezoresistance;
Conference_Titel :
Communications and Photonics Conference and Exhibition (ACP), 2009 Asia
Conference_Location :
Shanghai, China
Print_ISBN :
978-1-55752-877-3
Electronic_ISBN :
978-1-55752-877-3
