Generalized treatment of the low pressure plasma in modification processes

Low pressure plasma finds wide application in various technological processes related to modification of surfaces of details and elements of constructions. An abnormal glow discharge, where this plasma is obtained, provides maximal localization of technological action on a surface to be processed. The plasma volume geometry in equipment for modification processes distinguishes often from simple and convenient to mathematical modeling planar one. That is why the problem of high interest is the consideration of low pressure glow discharge plasma in more generalized treatment of spherical geometry. The study of diffusion processes influence on the property of glow discharge is carried out also. Calculations were conducted for the atmosphere of nitrogen at the pressure 1,1 Torr and current density 2 - 20 mA/cm² on the cathode surface. Radii of cathode were 0.2 - 2 cm and anode - 10 - 33 cm.