Influence of metastable molecules and negative ions on oxygen discharges

Author

Grubert, G.K. ; Loffhagen, D.

Author_Institution

INP Greifswald, Greifswald, Germany

fYear

2008

fDate

7-12 Sept. 2008

Firstpage

449

Lastpage

452

Abstract

Theoretical studies of low-pressure oxygen discharges in a reactor with plane parallel electrode arrangement are presented. A two-moment fluid description for the particle densities and fluxes coupled with Poisson´s equation has been adapted to analyze the ignition behavior and steady state characteristics of the discharge plasma at pressures between 60 and 100 Pa and voltages between -450 and -1000 V. In particular, it is verified, that metastable molecules and negative ions are of minor importance for the electrical properties at conditions typical of abnormal glow discharges.

Keywords

Poisson equation; electrodes; electron density; glow discharges; ion density; metastable states; oxygen; plasma chemistry; plasma density; plasma theory; plasma transport processes; O; Poisson equation; discharge plasma; electrical properties; glow discharges; ignition behavior; low-pressure oxygen discharges; metastable molecules; negative ions; particle density; particle flux; plane parallel electrode arrangement; pressure 60 Pa to 100 Pa; steady state characteristics; two-moment fluid; voltage -450 V to -1000 V; Electrodes; Glow discharges; Ignition; Inductors; Metastasis; Plasma density; Plasma properties; Poisson equations; Steady-state; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Gas Discharges and Their Applications, 2008. GD 2008. 17th International Conference on

Conference_Location

Cardiff

Print_ISBN

978-0-9558052-0-2

Type

conf

Filename

5379358