Fabrication and characterization of nanostructured HfO2 powder and ultra-thin films

Author

De Moraes Cavalcante, Fabio Henrique ; José, Maria ; Gomes, Ribeiro ; Soares, José Carvalho ; Carbonari, Artur Wilson ; de Abreu Rosseto, D. ; Dias Pereira, Luciano Fabricio ; Mestnik-Filho, José ; Saxena, Rajendra ; Mitani, S.E. ; De Andrade, Leandro Hos

Author_Institution

Lab. de Interaccoes Hiperfinas e Instrumentacao, Univ. de Lisboa, Lisbon, Portugal

fYear

2009

fDate

26-30 July 2009

Firstpage

904

Lastpage

906

Abstract

In this work, we report the fabrication process of nanostrutured powder using a Sol-Gel method and HfO₂ nanofilms obtained via Pulsed-Laser-Ablation and Electron-Beam Evaporation. The results of the investigation of structural properties and defects of HfO₂ nanoparticles and thin films are discussed in terms of the electric quadrupole interactions of the nuclear probe ¹⁸¹Ta within the sample volume measured by the perturbed angular correlation spectroscopy.

Keywords

angular correlation techniques; electron beam deposition; high-k dielectric thin films; nanoparticles; pulsed laser deposition; quadrupole interactions; sol-gel processing; HfO₂; electric quadrupole interactions; electron beam evaporation; nanostructured powder; perturbed angular correlation spectroscopy; pulsed laser ablation; sol-gel method; ultrathin films; Electric variables measurement; Fabrication; Hafnium oxide; Nanoparticles; Nuclear measurements; Powders; Probes; Spectroscopy; Transistors; Volume measurement; component; electron beam evaporation; perturbed angular correlation; pulsed-laser-ablation; thin films;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference on

Conference_Location

Genoa

ISSN

1944-9399

Print_ISBN

978-1-4244-4832-6

Electronic_ISBN

1944-9399

Type

conf

Filename

5394638