All-oxide crystalline microelectromechanical systems: Fabrication technique for strontium titanate micro-cantilevers

Author

Biasotti, M. ; Pellegrino, Laurent ; Bellingeri, E. ; Bernini, Cristina ; Siri, A.S. ; Marre, D.

Author_Institution

LAMIA, CNR, Genova, Italy

fYear

2009

fDate

26-30 July 2009

Firstpage

359

Lastpage

361

Abstract

A microelectromechanical system (MEMS) entirely made of crystalline oxides is presented. A suspended SrTiO₃ (001) microcantilever is employed as flexible substrate for the deposition of epitaxial transition-metal oxide films. A strain-generator device for epitaxial oxide films can be fabricated. Strain at surface can be performed by bending downward the microcantilever. The mechanical properties of these oxide MEMS are modeled by finite element methods and are in accordance with preliminary mechanical characterizations performed with atomic force microscopy. Evaluation of the applied strain and its distribution along the microcantilever is also given.

Keywords

atomic force microscopy; cantilevers; finite element analysis; micromechanical devices; strontium compounds; substrates; SrTiO₃; atomic force microscopy; crystalline oxides; epitaxial transition-metal oxide films; finite element methods; flexible substrate; mechanical properties; microcantilevers; microelectromechanical systems; strain-generator device; strontium titanate; Atomic force microscopy; Capacitive sensors; Crystallization; Fabrication; Mechanical factors; Microelectromechanical systems; Micromechanical devices; Strontium; Substrates; Titanium compounds; MEMS; Strain; Strain device; Transition metal Oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference on

Conference_Location

Genoa

ISSN

1944-9399

Print_ISBN

978-1-4244-4832-6

Electronic_ISBN

1944-9399

Type

conf

Filename

5394643