On the construction of problem-specific basis functions for modelling the massloading effects in micro-acoustic devices

This paper presents an efficient algorithm for modelling the massloading effect in 3D models of micro-acoustic devices, utilizing mesh-less Legendre, Jacobi-Galerkin approximations. The efficacy and utility of the proposed method rely on the construction of a set of problem-specific orthogonal basis functions, and the series expansion of non-separable field functions in terms of these functions. The ability to permit parallelization along with construction of closed-form formulae for the derivatives and definite integrals of the basis functions are further key features of our method. The feasibility of the method is demonstrated by obtaining numerical results for homogeneous boundary conditions for 2D and 3D problems. Our results are compared against available numerical data obtained by conventional finite element method implementations. Excellent agreement has been achieved.