DocumentCode :
511899
Title :
Analysis of sense finger dynamics for accurate ΣΔ MEMS accelerometer modelling in VHDL-AMS
Author :
Zhao, Chenxu ; Kazmierski, Tom J.
Author_Institution :
Sch. of Electron. & Comput. Sci., Univ. of Southampton, Southampton, UK
fYear :
2009
fDate :
22-24 Sept. 2009
Firstpage :
1
Lastpage :
4
Abstract :
The sense finger dynamics in the capacitive MEMS accelerometer affect the performance of electromechanical mixed-domain Sigma-Delta control loop. Correct behaviour can not be correctly predicted by conventional lumped model of the mechanical sensing element. This contribution presents an improved distributed mechanical model implemented in VHDL-AMS and detailed analysis of how sense finger dynamics affect the operation of the accelerometer when the system is subjected by jolt and step excitations. Such excitations are common in typical MEMS accelerometer applications in automobile safety systems.
Keywords :
accelerometers; capacitive sensors; delta-sigma modulation; hardware description languages; micromechanical devices; VHDL-AMS modelling; capacitive MEMS accelerometer; sense finger dynamics; sigma-delta control loop; Accelerometers; Automobiles; Bandwidth; Delta-sigma modulation; Fingers; Linearity; Micromechanical devices; Predictive models; Vehicle dynamics; Vehicle safety;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Specification & Design Languages, 2009. FDL 2009. Forum on
Conference_Location :
Sophia Antipolis
ISSN :
1636-9874
Electronic_ISBN :
1636-9874
Type :
conf
Filename :
5404039
Link To Document :
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