Reduced order macromodel extraction of MEMS based varactor and its system level simulation for RF applications

Author

Bhattacharya, Avik ; Chaudhuri, R.R. ; Chakraborty, Shiladri ; Bhattacharyya, Tarun Kanti

Author_Institution

Dept. of Electron. & Electr. Commun. Eng. (E & ECE), IIT Kharagpur, Kharagpur, India

fYear

2009

fDate

14-16 Dec. 2009

Firstpage

1

Lastpage

4

Abstract

With the development of various cutting edge finite element method (FEM) based software packages, it is becoming easier to simulate the behavior of any MEMS structure. As the simulation time in FEM based method is significant, reduced order dynamic macromodels are normally used to analyze the functional behavior of MEMS devices quickly. In this paper, we have presented a method for extracting reduced order macromodel of a surface micromachined tunable varactor structure and used it in system level simulation of a RF VCO circuit.

Keywords

finite element analysis; micromachining; micromechanical devices; varactors; voltage-controlled oscillators; MEMS-based varactor; RF VCO circuit; RF applications; cutting edge finite element method; functional behavior; reduced order macromodel extraction; software packages; surface micromachined tunable varactor structure; system level simulation; Analytical models; Application software; Circuit simulation; Finite element methods; Microelectromechanical devices; Micromechanical devices; Radio frequency; Software packages; Tunable circuits and devices; Varactors; DOF; Macromodel; VCO; Varactor;

fLanguage

English

Publisher

ieee

Conference_Titel

Computers and Devices for Communication, 2009. CODEC 2009. 4th International Conference on

Conference_Location

Kolkata

Print_ISBN

978-1-4244-5073-2

Type

conf

Filename

5407083