• DocumentCode
    513636
  • Title

    A Novel IC Compatible Push-Pull Mach-Zehnder Interferometer Optomechanical Pressure Sensor

  • Author

    Benaissa, K. ; Nathan, A.

  • Author_Institution
    Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, Ontario, Canada N2L 3G1
  • fYear
    1995
  • fDate
    25-27 Sept. 1995
  • Firstpage
    289
  • Lastpage
    292
  • Abstract
    We present a novel optomechanical Mach-Zehnder interferometer (MZI) pressure sensor that operates in push-pull mode to exploit the directional nature of the optical phase change with applied pressure. The sensor is based on the antiresonant reflecting optical waveguide (ARROW) and fabricated on silicon substrate using IC-compatible oxide and nitride dielectrics. In push-pull operation mode, the interferometer sensitivity to pressure is increased by 80% to attain 180¿rads/Pa.
  • Keywords
    Dielectric substrates; Optical buffering; Optical device fabrication; Optical interferometry; Optical losses; Optical propagation; Optical refraction; Optical sensors; Optical variables control; Optical waveguides;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference, 1995. ESSDERC '95. Proceedings of the 25th European
  • Conference_Location
    The Hague, The Netherlands
  • Print_ISBN
    286332182X
  • Type

    conf

  • Filename
    5435877
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=513636