Title :
A Novel IC Compatible Push-Pull Mach-Zehnder Interferometer Optomechanical Pressure Sensor
Author :
Benaissa, K. ; Nathan, A.
Author_Institution :
Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, Ontario, Canada N2L 3G1
Abstract :
We present a novel optomechanical Mach-Zehnder interferometer (MZI) pressure sensor that operates in push-pull mode to exploit the directional nature of the optical phase change with applied pressure. The sensor is based on the antiresonant reflecting optical waveguide (ARROW) and fabricated on silicon substrate using IC-compatible oxide and nitride dielectrics. In push-pull operation mode, the interferometer sensitivity to pressure is increased by 80% to attain 180¿rads/Pa.
Keywords :
Dielectric substrates; Optical buffering; Optical device fabrication; Optical interferometry; Optical losses; Optical propagation; Optical refraction; Optical sensors; Optical variables control; Optical waveguides;
Conference_Titel :
Solid State Device Research Conference, 1995. ESSDERC '95. Proceedings of the 25th European
Conference_Location :
The Hague, The Netherlands
