DocumentCode
513651
Title
Surface Micromachined Accelerometer with Increased Working Capacitance and Force Feedback Operation
Author
Wenk, B. ; Ramos-Martos, J. ; Fehrenbach, M. ; Lange, P. ; Offenberg, M. ; Riethmuller, W.
Author_Institution
Fraunhofer-Institut Siliziumtechnologie, Dillenburgerstr. 53, D- 14199 Berlin, Germany, phone: + 49 30 82998-304, fax: +49 30 82998-199
fYear
1995
fDate
25-27 Sept. 1995
Firstpage
343
Lastpage
346
Abstract
A surface micromachined accelerometer has been realized by using a 10¿m thick polysilicon layer. The sensor is designed as a differential capacitor and works in a force feedback mode to improve the sensor performance The evaluation circuit is realized as a seperate chip. The measured closed loop sensitivity is 8m V/g, the bandwidth is about 10kHz. A resolution of 0.1g and a linearity error of less than 1% is achieved for an measurement range of +/- 100 g.
Keywords
Accelerometers; Capacitance; Capacitive sensors; Capacitors; Electrodes; Fingers; Force feedback; Silicon; Springs; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1995. ESSDERC '95. Proceedings of the 25th European
Conference_Location
The Hague, The Netherlands
Print_ISBN
286332182X
Type
conf
Filename
5435895
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